Investigation on Ferroelectric Characterization of Hafnium-Oxide-Based Ferroelectric Memories with Remote Plasma Treatments

碩士 === 國立交通大學 === 照明與能源光電研究所 === 107

Bibliographic Details
Main Authors: Lee, You-Ting, 李宥霆
Other Authors: Chang, Chun-Yen
Format: Others
Language:zh-TW
Published: 2018
Online Access:http://ndltd.ncl.edu.tw/handle/57u78k