Selective Deposition of ZnO on Silicon Nanodevices for Humidity Sensing Application
碩士 === 國立交通大學 === 應用化學系分子科學碩博士班 === 107 === In this work, a novel n+/n-/n+ polysilicon nanobelt (PNB) device has been presented for selective deposition of ZnO on n- region via atomic layer deposition (ALD) and device localized Joule self-heating. The device surface temperature was estimated via the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/s4f8zv |