Study of C-axis Aluminum Nitride Piezoelectric Films via Low-temperature Sputtering Method for Lead-free Piezoelectric MEMS Accelerometer Applications
碩士 === 國立成功大學 === 奈米積體電路工程碩士學位學程 === 107
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/79hcd7 |