Investigation of piezoelectric properties of MgxZn1-xO/ZnO heterostructure thin films
碩士 === 國立成功大學 === 材料科學及工程學系 === 107 === We investigate the piezoelectric coefficient (d33) of MgxZn1-xO and MgxZn1-xO/ZnO films with the variation of the Mg concentration. The films are grown on Si (111) substrate using MgO and ZnO as targets by radio frequency magnetron sputtering. The thickness of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/v6w79j |