SiO2/ Metal/ScAlN/LiNbO3 Multilayer Structure for High k2 and Low TCF SAW Devices

碩士 === 國立成功大學 === 材料科學及工程學系 === 107

Bibliographic Details
Main Authors: Yu-HsuanHuang, 黃宥瑄
Other Authors: Jow-Lay Huang
Format: Others
Language:zh-TW
Published: 2019
Online Access:http://ndltd.ncl.edu.tw/handle/azjdr2

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