SiO2/ Metal/ScAlN/LiNbO3 Multilayer Structure for High k2 and Low TCF SAW Devices
碩士 === 國立成功大學 === 材料科學及工程學系 === 107
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/azjdr2 |