Development of photoelectric geometric error calibration system for precision manufacturing machines

博士 === 國立成功大學 === 工程科學系 === 107 === With the advancement of precision manufacturing, the precision requirements of the manufacturing equipment are constantly increasing. The finished products are moved toward two trends: one is that the product size is downsized into micro-/nano-meter scale, the oth...

Full description

Bibliographic Details
Main Authors: PO-YUCHEN, 陳柏宇
Other Authors: Ming-Shi Wang
Format: Others
Language:en_US
Published: 2019
Online Access:http://ndltd.ncl.edu.tw/handle/ca8ddf