Using Focused Ion Beam – Digital Image Correlation ring-core method for the Residual Stress measurement of different thin films
碩士 === 國立中興大學 === 精密工程學系所 === 107 === In this study, a zirconium nitride (ZrN) test piece with a thickness of about 1 um was fabricated using an unbalanced magnetron sputtering process. The residual stress of the film was measured by X-ray diffraction (XRD), and the focus was measured. Focused Ion B...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/cgi-bin/gs32/gsweb.cgi/login?o=dnclcdr&s=id=%22107NCHU5693023%22.&searchmode=basic |