Effect of Al-Doped ZnO Transparent Conducting Layers on Performance of AlGaInP Light-Emitting Diodes Using Atomic Layer Deposition
博士 === 國立中興大學 === 材料科學與工程學系所 === 107 === In this dessirtation, the atomic layer deposition (ALD) was employed to deposite the zinc oxide (ZnO) and Al-doped ZnO (AZO) thin films on the glass substrates. Various Zn:Al cycle ratios of precursors were utilized to control the Al composition of the AZO th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/cgi-bin/gs32/gsweb.cgi/login?o=dnclcdr&s=id=%22107NCHU5159077%22.&searchmode=basic |