Coloration and Mechanical Property Evaluation of TiNxOy Coatings Grown by a Superimposed High Power Impulse Magnetron Sputtering
碩士 === 明志科技大學 === 材料工程系碩士班 === 107 === Transition metal nitride thin films and transition metal oxide thin films have been widely used as functional coatings in many areas due to their hardness, thermal stability and wear resistance. Recently, transition metal oxynitrides (TMeNxOy), especially TiNxO...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2019
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Online Access: | http://ndltd.ncl.edu.tw/handle/48967k |