Effect of Film Thickness on Characteristics of Titanium Dioxide Film Treated by Hydrogen Nitrogen Plasma Annealing

碩士 === 崑山科技大學 === 電機工程研究所 === 107 === In the study, the titanium dioxide (TiO2) stack was applied to the borosilicate glass test piece by the ion sputtering principle of the RF sputtering machine. Films were formed and three different thicknesses of titanium dioxide (TiO2) slides were prepared, whic...

Full description

Bibliographic Details
Main Authors: Hsuehli-Chang, 張學騹
Other Authors: Shenzhou-Zhang
Format: Others
Language:zh-TW
Published: 2019
Online Access:http://ndltd.ncl.edu.tw/handle/h2shgj