Chemical Combination of Graphene/Polyurethane Slurry for Advanced Chemical Mechanical Polishing of Single Crystalline SiC Wafers
碩士 === 逢甲大學 === 機械與電腦輔助工程學系 === 107 === The chemical combination of graphene / polyurethane slurry prepared in this paper is a modification of polyurethane (PU) microspheres and graphene oxide (GO), that is, the NCO end of PU functional group-OH terminal of GO are bonded to form a chemically grafted...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/39qc9e |