The Development of Diamond Grinding Wheels with Self-Dressed Properties and Their Impact on Grinding Effect of Wafers
碩士 === 逢甲大學 === 纖維與複合材料學系 === 107 === Wafers used in the semiconductor industry have been developed from the first generation of Monocrystalline Silicon Wafers to the third generation of wide-bandgap semiconductors, and Silicon Carbide Wafers are one of them.Surface roughness control is very impo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/59w2bz |