Synthesis of Layered InS Material for Field-Effect Transistor Device Application

碩士 === 逢甲大學 === 自動控制工程學系 === 107 === In this research, a single crystal triangular structure and a film of InS were synthesized by chemical vapor deposition. We produce a high temperature environment through a furnace and control the pressure in a low pressure environment by introducing the argon an...

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Bibliographic Details
Main Authors: Tu, Chien-Liang, 凃建良
Other Authors: Hung, San-Shan
Format: Others
Language:zh-TW
Published: 2019
Online Access:http://ndltd.ncl.edu.tw/handle/qhh8ra