Recovery of Gold, Titanium and Aluminum from Sputtering Materials

碩士 === 大葉大學 === 環境工程學系研究所 === 107 === According to the results of this research, the total contents of Gold (Au), Titanium (Ti) and Aluminum (Al) metals of the collected sputtering materials are 285,005 mg/kg, 68,314 mg/kg and 544,633 mg/kg, respectively. And the analysis results show this collected...

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Bibliographic Details
Main Authors: JUNG YU-TANG, 鍾鈺堂
Other Authors: LEE CHING-HWA
Format: Others
Language:zh-TW
Published: 2019
Online Access:http://ndltd.ncl.edu.tw/handle/v4c744