Recovery of Gold, Titanium and Aluminum from Sputtering Materials
碩士 === 大葉大學 === 環境工程學系研究所 === 107 === According to the results of this research, the total contents of Gold (Au), Titanium (Ti) and Aluminum (Al) metals of the collected sputtering materials are 285,005 mg/kg, 68,314 mg/kg and 544,633 mg/kg, respectively. And the analysis results show this collected...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2019
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Online Access: | http://ndltd.ncl.edu.tw/handle/v4c744 |