Dry Pump Fault Position Diagnosis in semiconductor processing

• Main Authors: Fang-Yu Zhou, 周芳毓
• Other Authors: Yuan-Ping Lu
• Format: Others
• Language: zh-TW
• Published: 2018
• Online Access: http://ndltd.ncl.edu.tw/handle/vbmw24

碩士 === 國立臺北科技大學 === 機械工程系機電整合碩士班 === 106 === This research take discovers the vacuum pump breakdown position result of as the expectation, continues the pump failure predication to carry on the equipment replacement ahead of time, revolves the time characteristic of vibration data based on the pump, but through forecast the position may prepare the components and the reduction ahead of time opens the solution and the assembly time causes the service time interval from seven days reductions to three days, then lets in the cost the question be possible to obtain the improvement. This research in view of carries on the failure predication soon to have the vibration data which breakdown A, the B two vacuum pumps collect, and uses MATLAB to carry on Fourier to transform then uses the R language to take responsibility the ingredient analysis and the artificial kind of nerve network and observes of trend of escalation the graph, but after actual opens the solution the inside knowledge to compare the determination for to forecast knows has not set breaks down, enables the service time interval to be improved.