Dry Pump Fault Position Diagnosis in semiconductor processing
碩士 === 國立臺北科技大學 === 機械工程系機電整合碩士班 === 106 === This research take discovers the vacuum pump breakdown position result of as the expectation, continues the pump failure predication to carry on the equipment replacement ahead of time, revolves the time characteristic of vibration data based on the pump,...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/vbmw24 |