Electrodeposition of CuZn film in Non-aqueous Solution
碩士 === 國立臺北科技大學 === 材料科學與工程研究所 === 106 === According to the Moore’s law, the feature size of integrated circuit is constantly shrink down. When the line width of aluminum was shrink down to 180nm, it has problem of high resistance, severe RC delay and electromigration effect. The aluminum wire was r...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/k73yfe |