Glancing Angle Deposition of Titanium Nitride Nanorod Array: Surface Morphology and Optical Properties Analysis
碩士 === 國立臺北科技大學 === 光電工程系 === 106 === In this work, we used DC magnetron sputtering and glancing angle deposition (GLAD) to deposit titanium nitride (TiN) nanorod array on silicon wafer, glass substrate (BK7) and sapphire substrate. The surface morphology of the nanostructures was explored by changi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/7vc3zt |