Properties of In-N codoped p-type ZnO transparent conducting thin films grown by pulsed laser deposition
碩士 === 國立臺北科技大學 === 光電工程系 === 106 === In this paper, In-N codoped ZnO thin film was grown on c-plane sapphire by pulsed laser deposition. We investigate the effect of changing the doping concentration, substrate temperature, growth pressure, and background gas flow ratio on the film properties. X-ra...
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/9yf853 |