Wafer Fault Detection and Health Index Analysis for Semiconductor Manufacturing
碩士 === 國立臺北科技大學 === 工業工程與管理系 === 106 === In recent years, with the development of artificial intelligence and the advancement of hardware equipment, the semiconductor industry has also boomed. How to improve the stability of process quality has deeply influenced the development of enterprise. Nowada...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2018
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/cq2j59 |