Study of Improvements in Piezoelectric Measurement System of Thin Films
碩士 === 樹德科技大學 === 電腦與通訊系碩士班 === 106 === In this paper, we discuss the development and improvement of a coupled piezoelectric film instrument. Use a stepping motor with precise positioning and high stability to replace the original servo motor to generate stress. Increase filter to eliminate noise in...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2018
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Online Access: | http://ndltd.ncl.edu.tw/handle/a4a4tu |