Electric Magnetron Arc Source Design of Cathodic Arc Evaporation and Deposition of AlTiN Hard Coatings
碩士 === 國立虎尾科技大學 === 機械與電腦輔助工程系碩士班 === 106 === The cathodic arc system of physical vapor deposition, because of its fast deposition rate and low cost of machine equipment, is widely used by the tool and mold industry coatings, but it has one of the biggest defects are particles and droplets deposited...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/6tmswb |