Growth of nitrogen doped DLC thin-film by ECR/RF hybrid plasma chemical vapor deposition system
碩士 === 國立臺灣科技大學 === 材料科學與工程系 === 106 === Diamond-like carbon (DLC) exhibits a lot of benefits, such as high hardness, high insulation, biocompatibility, high chemical inertness and thermal conductivity etc that had been widely used in the industry applications. In this study, DLC thin-film was grown...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/8zb2sz |