Study on Multi-Wire Reactive Electrophoretic Diamond Wire Sawing Process of Single-Crystalline Sapphire Wafers
碩士 === 國立臺灣科技大學 === 機械工程系 === 106 === Single crystal sapphire is a highly transmissive, high temperature resistant, and high hardness brittle semiconductor material, but with a good lattice matching with GaN for solid-state illumination. Diamond Wire Sawing (DWS) is usually used in the production of...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2018
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Online Access: | http://ndltd.ncl.edu.tw/handle/crnjyh |