Study on Multi-Wire Reactive Electrophoretic Diamond Wire Sawing Process of Single-Crystalline Sapphire Wafers

碩士 === 國立臺灣科技大學 === 機械工程系 === 106 === Single crystal sapphire is a highly transmissive, high temperature resistant, and high hardness brittle semiconductor material, but with a good lattice matching with GaN for solid-state illumination. Diamond Wire Sawing (DWS) is usually used in the production of...

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Bibliographic Details
Main Authors: Yi-De Li, 李奕德
Other Authors: Chao-Chang Chen
Format: Others
Language:zh-TW
Published: 2018
Online Access:http://ndltd.ncl.edu.tw/handle/crnjyh