Integration with Text-Mining and Ontology-Based Patent Analysis on Chemical Mechanical Polishing of Silicon Carbide Wafers
碩士 === 國立臺灣科技大學 === 機械工程系 === 106 === With urgent demand on electronic power system of high power performance, mono-crystalline Silicon carbide wafers have been considered as a high potential materials for high power IC devices. However, the ultra high hardness and excellent chemical stability of Si...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/bh8np7 |