Developing a TDS system and the analysis of the molecular binding energy on aluminum surface
碩士 === 國立清華大學 === 生醫工程與環境科學系 === 106 === In this thesis, a TDS (Thermal Desorption Spectroscopy) system was established at the vacuum system to measure the amount of molecular vapor desorbed on the aluminum surface during the thermal desorption process. In addition, the vacuum chamber can stay in a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/4h5awc |