Squeeze-film Damping Based CMOS MEMS Capacitive Resonant Pressure Sensor
碩士 === 國立清華大學 === 電子工程研究所 === 106 === The purpose of this paper is to investigate the application of the squeeze-film damping effect for barometric pressure sensing. Unlike traditional pressure sensors, a sealed cavity is not required for operation of this type of sensors; therefore the fabrication...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/j9a348 |