Reliability Analysis of CMOS-MEMS Capacitive Microphone with Serpentine Spring
碩士 === 國立清華大學 === 動力機械工程學系 === 106 === The reliability analysis of MEMS (Micro Electro Mechanical System) components is an important issue when developing the novel MEMS sensor. In this study, finite element models are used to analyze the reliability of CMOS-MEMS capacitive microphone with serpentin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/366bv8 |