The Research of Transparent Hard Coating Deposited by HIPIMS Deposition Technique
碩士 === 國立中央大學 === 照明與顯示科技研究所 === 106 === In this research, silicon nitride and silicon oxynitride films have been fabricated by using the high-power impulse magnetron sputtering and closed field unbalanced magnetron sputtering system with Si targets.According to the research results, the average tra...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/3j3338 |