Development of silicon thin film process for solar cells with plasma diagnostic tools
博士 === 國立中央大學 === 機械工程學系 === 106 === In this study, using hardware equipment as the starting point, the in situ plasma diagnostic systems of optical emission spectrometry (OES) and quadrupole mass spectrometry (QMS) was used to improve the hardware and process of PECVD machine, and a complete PECVD...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/wsjtye |