Numerical analysis of pulsed injection MOCVD method to grow AlxGa1-xN multi-layer structure in horizontal reactor
碩士 === 國立中央大學 === 機械工程學系 === 106 === Metal Organic Chemical Vapor Deposition (MOCVD) is an important process for LED manufacture because of the unique advantages including uniform epitaxial layer and high purity of the material. In this study, a complicated chemical mechanism and mass transport phen...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/23bcbq |