Designer Ge-dots embedded emitters and Ge-dots photodetector for monolithically-integrated Si optical interconnects
博士 === 國立中央大學 === 電機工程學系 === 106 === This thesis demonstrates the capability of precise control of locations and numbers of Ge QDs within Si3N4 or SiO2. Based on the “designer” Ge nanodots in Si3N4 and SiO2 matrix on Si substrate through high-temperature selective thermal oxidation of SiGe nanopilla...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2018
|
Online Access: | http://ndltd.ncl.edu.tw/handle/a4z5c2 |