Transport phenomenon analysis in MOCVD planetary reactor by the realistic numerical model
碩士 === 國立中央大學 === 能源工程研究所 === 106 === Gallium nitride receives lots of attention in the application of deep ultraviolet, power device and high frequency community device because of the high energy band gap and high electron mobility. Metal organic chemical vapor deposition is an important method to...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47u49k |