Utilizing the advanced confocal microscope on the diagnosis of micro-electronic and opeo-electronic devices
碩士 === 國立交通大學 === 照明與能源光電研究所 === 106 === The system based on automatic optical inspection is helpful for product yield judgment and defect detection. This thesis proposes a confocal microscope with horizontal submicron resolution and longitudinal nano resolutions, which features non-invasive and rap...
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| Format: | Others |
| Language: | zh-TW |
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2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/r6vmzc |
| Summary: | 碩士 === 國立交通大學 === 照明與能源光電研究所 === 106 === The system based on automatic optical inspection is helpful for product yield judgment and defect detection. This thesis proposes a confocal microscope with horizontal submicron resolution and longitudinal nano resolutions, which features non-invasive and rapid measurement of three-dimensional surface profile information of the sample. In addition to the static surface and depth information of the sample, the microscope can also observe the dynamic thermal expansion and contraction of the sample and the change of the internal ion/carrier concentration distribution below the surface. We demonstrated the superiority of the microscope by measuring three different samples (cement resistors, integrated circuit elements, and light emitting electrochemical elements) and showed their potential for academic research and engineering applications.
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