Utilizing the advanced confocal microscope on the diagnosis of micro-electronic and opeo-electronic devices
碩士 === 國立交通大學 === 照明與能源光電研究所 === 106 === The system based on automatic optical inspection is helpful for product yield judgment and defect detection. This thesis proposes a confocal microscope with horizontal submicron resolution and longitudinal nano resolutions, which features non-invasive and rap...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/r6vmzc |