Investigation of Indium Tungsten Oxide Thin Film Fabricated by RF Sputtering System and Their Applications
碩士 === 國立成功大學 === 奈米積體電路工程碩士學位學程 === 106 === In this thesis, indium tungsten oxide (IWO) is deposited by RF magnetron sputtering. The IWO film properties are discussed in detail under different processing ambiences. Afterwards, the deposited IWO thin films were used as channel layer for UV photodete...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/8nvwrk |