Application of Metal Contact Transfer Lithography and Deformable Flexible Mold
碩士 === 國立成功大學 === 機械工程學系 === 106 === This paper investigates three separate issues in the area of nanoimprinting and contact transfer. The first part is laser-assisted direct metal transfer. It is mainly based on the Infrared Laser-Assisted Direct Contact Printing Lithography previously developed. T...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2018
|
Online Access: | http://ndltd.ncl.edu.tw/handle/4pgeve |