Application of Metal Contact Transfer Lithography and Deformable Flexible Mold

碩士 === 國立成功大學 === 機械工程學系 === 106 === This paper investigates three separate issues in the area of nanoimprinting and contact transfer. The first part is laser-assisted direct metal transfer. It is mainly based on the Infrared Laser-Assisted Direct Contact Printing Lithography previously developed. T...

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Bibliographic Details
Main Authors: Jei-KaiChang, 張傑凱
Other Authors: Yung-Chun Lee
Format: Others
Language:zh-TW
Published: 2018
Online Access:http://ndltd.ncl.edu.tw/handle/4pgeve