The highly sensitive and electrical performance of ZnO-based thin-film transistor with high-k ZrO2 material dielectric layer for gas sensing
碩士 === 國立勤益科技大學 === 電子工程系 === 106 === In recent years, the trend of Moore's Law, the smaller and smaller the transistor, the short channel effect caused by the problem, high-K materials have gradually been paid attention to, metal oxide semiconductor compounds due to its high electron mobility,...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2018
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Online Access: | http://ndltd.ncl.edu.tw/handle/wt38c4 |