Experimental Study of the Cutting Performance and AE Signal Generation for Silicon Wafer Micro Milling with Diamond Coated Tool
碩士 === 國立中興大學 === 機械工程學系所 === 106 === Brittle material such as the single crystal silicon, glass, and ceramic is used widely for the micro component. Due to the increase demand for the component with the complex geometry, the mechanical cutting technology draws much more attention than before for t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/rqsa8r |