Morphology Control of Conductive TiN Films Produced by Air-based Sputtering for Direct Methanol Fuel Cells and Electromagnetic Shielding Applications
碩士 === 國立中興大學 === 材料科學與工程學系所 === 106 === TiN is an important coating material with many technological applications because of its high hardness and corrosion resistance, as well as low resistivity. There are more applications expected if the morphology of TiN thin films can be facilely tailored duri...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/hr522p |