Effects of multilayer structures on hydrogenated amorphous silicon p-i-n solar cells
碩士 === 國立中興大學 === 光電工程研究所 === 106 === In this thesis, hydrogenated amorphous silicon (a-Si:H), hydrogenated proto-crystalline silicon (pc-Si:H) and hydrogenated nanocrystalline silicon (nc-Si:H) films were fabricated by a pulse-wave modulated plasma-enhanced chemical vapor deposition (PECVD) system...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2018
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Online Access: | http://ndltd.ncl.edu.tw/handle/8sf3b8 |