Effects of multilayer structures on hydrogenated amorphous silicon p-i-n solar cells

碩士 === 國立中興大學 === 光電工程研究所 === 106 === In this thesis, hydrogenated amorphous silicon (a-Si:H), hydrogenated proto-crystalline silicon (pc-Si:H) and hydrogenated nanocrystalline silicon (nc-Si:H) films were fabricated by a pulse-wave modulated plasma-enhanced chemical vapor deposition (PECVD) system...

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Bibliographic Details
Main Authors: Jing-Chung Chen, 陳敬忠
Other Authors: 江雨龍
Format: Others
Language:zh-TW
Published: 2018
Online Access:http://ndltd.ncl.edu.tw/handle/8sf3b8