Study on the doping and properties of In2O3 thin films
碩士 === 義守大學 === 材料科學與工程學系 === 106 === In this experiment, on quartz glass substrates by RF magnetron sputtering system was used for co-sputtering, using DC POWER and RF POWER, respectively, to change the deposition doping number, such as sputtering atmosphere, sputtering wattage , and then through d...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/8tufr3 |