Optical Effectiveness of Parylene N Thin Films Deposited in High Vacuum
碩士 === 輔仁大學 === 物理學系碩士班 === 106 === In this paper, parylene N was deposited on the surface of substrate by high-vacuum (about 10-4 Torr) physical vapor deposition. The film has the characteristics of uniformity, compactness and pinhole-free. The substrates used in this experiment were B270 glass sub...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2018
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Online Access: | http://ndltd.ncl.edu.tw/handle/e7g9g5 |