To Study the Sintering Techniques of Si3N4 Ceramic Coatings on Quartz Crucible
碩士 === 大葉大學 === 醫療器材設計與材料碩士學位學程 === 106 === In this research, discarded crucible fragments obtained from single crystal silicon rod manufacturing industrial, were used as the experimental substrate material for sintering study. The Si3N4 was selected as slurry material to study the sintering proce...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/fn9fnz |