Design and Analysis of miniature low power CMOS-MEMS fluxgate magnetic sensor
碩士 === 國立臺北科技大學 === 機電科技研究所 === 105 === This paper explores the low power design parameters of the planer microfluxgate vector magnetic sensor. The planer excition coil and induction coil were implemented on a 1 mm ×1 mm CMOS MEMS chip of 0.18 μm process provided by the Chip Implementation Center (C...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Online Access: | http://ndltd.ncl.edu.tw/handle/dn585r |