The Study on Process Improvement of Multi-Layer Organic Substrate
碩士 === 國立臺北科技大學 === 機電整合研究所 === 105 === In this study micro electromechanical system (MEMS) technology was used to fabrication of multi-layer organic substrate protect structure, by lithography, copper electroplating, and mechanical polishing. Because of the line width limit of multi-layer organic s...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/fvsbks |