Research and Development of Probe-clamping Mechanism for AFM

• Main Authors: Shu-Kai,Ding, 丁書楷
• Other Authors: 徐正會,吳明川
• Format: Others
• Language: zh-TW
• Published: 2017
• Online Access: http://ndltd.ncl.edu.tw/handle/24g4ye

碩士 === 國立臺北科技大學 === 機電整合研究所 === 105 === A probe clamping mechanism was developed in this research for atomic force microscope. It was designed the taper at a movable lower jaw probe clamping, and coordinated with the fix upper jaw which made the probe to be able to automatically positioned and finished repeatability replacement. Lower jaw rotation shaft was designed between upper jaw and lower jaw and combined with the spring to produce the force to clamp the probe that cause it wasn’t able to exchange any components and let it more convenient. To make the probe could set at upper jaw stably, the stopper, upper jaw, and lower jaw were used to increase the contact surface which was able to avoid influencing interference measurement resolution in the period of process. This research had collected, classified, and analyzed the relevant patents around the world to avoid the patents which are already used by others. To sum up, we classified the advantages and disadvantages of the mechanism and arrange the type synthesis of it. Moreover, 3D model was built by computer-aided design software in order to simulate its movements, to verify the 3D model was not interfered and the new-decided clamping mechanism can position properly. Finally, a prototype was built and it tested some functions to assess whether it prototype reached the expected functions, and made necessary corrections so that the final results can meet the original design goals. This study has already applied for the patent.