Modellong and control for a Precision Positioning stage actuated by a walking piezo motor
碩士 === 國立臺北科技大學 === 自動化科技研究所 === 105 === In recent years, due to the rapid development of high-precision optical electromechanical technology, especially in the long-stroke high precision positioning control, the piezo motors or ultrasonic motors are used as the actuators in more and more applicatio...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/7gw4qk |