Phase-Shifting interference microscope with extendable field of measurement

• Main Authors: Ming-Hsiang Wang, 王銘祥
• Other Authors: Shyh-Tsong Lin
• Format: Others
• Language: zh-TW
• Published: 2017
• Online Access: http://ndltd.ncl.edu.tw/handle/ekat23

碩士 === 國立臺北科技大學 === 光電工程系研究所 === 105 === This research proposes an innovative phase-shifting interference microscope available for profiling micro-structure contours. It is composes of a light source module, phase modulation module, and interferometric module; it achieves the inspections using five-step phase-shifting algorithm; and it possesses the capability to extend its field of measurement. This paper is to introduce the configuration, measurement theory, experimental setup, and experimental results of the proposed interference microscope. The results confirm its validity and applicability, furthermore the results show that the inspections have a standard deviation of 2.4nm.